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Computer Aided Design - CAD > LSI > OPC Rules
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OPC Rules

by "szamani" <szamani@[EMAIL PROTECTED] > Mar 18, 2006 at 06:44 AM

Hi,
I was wondering if there is any document about exact OPC (Optical
Proximity Correction) rules for 90 nm and below technologies. (how to
insert features etc.)

Thanks,
szamani




 1 Posts in Topic:
OPC Rules
 "szamani" <s  2006-03-18 06:44:56 

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tan12V112 Sun Jul 6 7:02:45 CDT 2008.