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Computer Aided Design - CAD > Compass Design Automation > Ask for OPC/PSM...
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Ask for OPC/PSM simulation tools

by "news.tamu.edu" <janoffice2004@[EMAIL PROTECTED] > Nov 30, 2004 at 11:02 AM

Does Someone know where could I find OPC(Optical Proximity Correction) /PSM
(Phase-shift Masking) Simulation tools? Or some tools for current
Lithography Tech?

Thanks.




 1 Posts in Topic:
Ask for OPC/PSM simulation tools
 "news.tamu.edu"  2004-11-30 11:02:27 

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tan12V112 Fri Jul 4 14:09:57 CDT 2008.