Hello,
Does anyone know how to run lithography simulation after layout? It is
said this would improve yield. Currently in our group, we have Calibre
Litho-Friendly Design package (LFD) for this purpose, but we don't
have the lithography simulation rule file. Is the lithography rule
file provided by the foundry or the same as DRC file?
Thanks and looking forward to your reply.
Regards,
Mobil
